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Critical modulation transfer function

A concept that is related to MTF is the critical modulation transfer function (CMTF), which is a useful approximation for determining minimum modulation required for a photoresist. The minimum required modulation of a resist with (base 10) contrast y is expressed as ... [Pg.675]

The detectability of critical defects with CT depends on the final image quality and the skill of the operator, see figure 2. The basic concepts of image quality are resolution, contrast, and noise. Image quality are generally described by the signal-to-noise ratio SNR), the modulation transfer function (MTF) and the noise power spectrum (NFS). SNR is the quotient of a signal and its variance, MTF describes the contrast as a function of spatial frequency and NFS in turn describes the noise power at various spatial frequencies [1, 3]. [Pg.209]

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Functional Module

Modulating function

Modulation functions

Modulation transfer function

Module function

Transfer function

Transfer function functions

Transference function

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