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Columns in DC Discharge of Argon

Cathode region Positive column Anode glow [Pg.14]

These characteristics of glow in an LCVD reactor cast some serious questions regarding the nature of glow and the domain of plasma in a reactor. It is certain that one cannot intuitively assume that the luminous gas phase (glow) in glow discharge is plasma, while plasma has characteristic glow. [Pg.14]


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