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Chloromethylated polydiphenylsiloxane

Poly(dimethyl diphenyl-vinyl siloxane) Chloromethylated polydiphenylsiloxane Poly(trimethylstannylstyrene-co-chlorostyrene) Poly(trimethylsilylstyrene-co-chloromethylstyrene)... [Pg.191]

We have developed a new silicone based negative resist (SNR) by introducing the chloromethyl group into polydiphenylsiloxane. SNR has a high Tg (170 C), good electron beam sensitivity and excellent durability to 02 RIE (9). In this paper we describe the SNR preparation and characteristics, and demonstrate a high resolution of 2LR system using this resist. [Pg.311]

Siloxanes play an important role in wafer fabrication. They are not only used for planarization and passivating purposes but are of increasing interest in the field of microlithography. The synthesis of polydiphenylsiloxane containing around 20% of chlorobenzyl groups can be achieved by chloromethylation of oligomeric diphenyl siloxanes ... [Pg.1350]

See other pages where Chloromethylated polydiphenylsiloxane is mentioned: [Pg.73]    [Pg.68]    [Pg.192]   
See also in sourсe #XX -- [ Pg.192 , Pg.194 ]



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