Chemical vapour deposition device preparation

In Takahashi et al. (2005) a suspended MEMS based micro-fuel reformer was designed and manufactured, and the performance of the reformer evaluated. In this study, in-situ chemical vapour deposition (CVD) of the alumina catalyst bed on a membrane was used as the preparation method for better mechanical and thermal isolation of the reaction zone on the membrane. Most of the microfabricated Pd-based MMs are much more efficient than the conventional thicker or large scale devices, as reported by many authors. 

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