Chemical Interactions Between Abrasive and

Chemical interactions between the abrasive particle and the oxide surface occur and may result in highly accelerated polish rates. Ceria abrasive, for example, exhibits a chemical tooth proper- 

Cook gives five reaction steps important in determining the rate of mass transport during polishing. These are  

Water reacts with the surface leading to dissolution under the influence of the applied load  

Some dissolution products adsorb onto the abrasive particle and are moved away from the surface  

Some dissolution products redeposit back onto the surface  

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