Chemical amplification positive resists and their imaging mechanisms

2 Chemical amplification positive resists and their imaging mechanisms 

A shown in Fig. 7.1, there are two hroad categories of chemical amplification resists based on their imaging mechanisms, namely, (i) those based on acid-catalyzed main chain scission and (ii) those based on functional group polarity switch brought about by acid-catalyzed deprotection of lipophilic pendant groups, depolymerization, and Claisen rearrangement. 

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