Implants channeled

The depth profiles in Fig. 3.26 show that the typical flat channeling implantation profile is generated with low doses only. Increasing the dose superimposes the normal implantation profile shape. Undertaking such experiments with homogeneous wafers enables the production of calibrating models for semiconductor production. 

Random and channeled implanted profiles in 6H-SiC are shown in Figure 4.11(a). These profiles correspond to implants performed at RT with 1.5 MeV AF to a low fluence ( 10 cm" ). The flux is not accurately defined because of the experimental constraints, as explained in [74]. In fact, most of the studies concerning channeled implants make use of ion beams in single- spot configurations and have to face the problems related to nonhomogeneous flux distribution within the beam spot. The... 

Figure 4.11 Random and channeled doping profiles in 6H-SiC. (a) Comparison between SIMS measurements and MD simulations for a low fluence value. (From [74], 2000 Material Science Forum. Reprinted with permission.) (b) Evolution of the SIMS profiles for channeled implants at increasing fluence values. (From [24], 1999 American Institute of Physics. Reprinted with permission.)...

Zolnai, Z., et al., Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide, Mater. Sci. Forum, Vol. 433 36, 2003, pp. 645-648. 

A multichannel totally implanted FES system [51 ] was proposed and tested in few subjects. This system uses a 16-channel implantable stimulator and attached to the epineurium electrodes. Femoral and gluteal nerves were stimulated for hip and knee extension. The so-called round-about stimulation was applied in which four electrodes were located around the nerve and stimulated intermittently. This stimulation method reduces muscle fatigue. 

Ziaie, B., Nardin, M.D., Coghlan, A.R., and Najafi, K., A single channel implantable microstimulator for functional neuromuscular stimulation, IEEE Trans. Biomed. Eng. BME-44 909-920, 1997. 

Respiration—Respiratory control systems involve a two-channel implantable stimulator with electrodes applied bilaterally to the phrenic nerve. Most of the devices in clinical use were developed by Avery Laboratories (Dobelle Institute) and employed discrete circuitry with epoxy encapsulation of the implant and a nerve cuff electrode. Approximately 1000 of these devices have been implanted in patients with respiratory disorders such as high-level tetraplegia (Glenn et al.. 

Xu, X.M., Zhang, S.X., Li, H.Y., Aebischer, R, and Bunge, M.B., Regrowth of axons into the distal spinal cord through a Schwann-ceU-seeded mini-channel implanted into hemisected adult rat spinal cord, Eur. J. Neurosci 11,1723-1740,1999. 

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