Catalyst-assisted Chemical Vapour DepositionD Process

4 Catalyst-assisted Chemical Vapour DepositionD Process 

In addition, the vapour-solid (VS) mechanism was proposed to explain whisker growth for some materials. It should be pointed out that the morphology of the crystal growth has a very complex relationship with the catalyst and the processing conditions. 

A source gas inlet (acetylene-thiophene-hfc) B gas outlet C substrate D susceptor (graphite plate) E reaction tube (quartz, 

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