Cantilever sensor, operation under

Nakabeppu et al. [58] describe the use of composite cantilevers made from tin or gold deposited on conventional silicon nitride AFM probes to detect spatial variations in temperature across an indium/tin oxide heater. Differential thermal expansion of the bimetallic elements causes the beam to bend. This movement is monitored using the AFM optical lever deflection detection system. In order to separate thermal deflection of the beam from displacement of the cantilever caused by the sample topography, an intermittent contact mode of operation is employed. Measurements were made under vacuum so as to minimize heat loss. A more practical use of this technology is in the form of miniature chemical and thermal sensors [59]. This approach has been used to perform thermal analysis on picolitre volumes of materisd deposited on the end of a bimetallic cantilever [60]. Arrays of such devices have applications as highly sensitive electronic noses . 

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