Cabrera-Mott expression

The rate of oxide growth according to the Cabrera-Mott expression can be written as... 

The integrated form of the Cabrera-Mott expression [Eq. (2)] has been applied to the dry oxidation of silicon [29-31]. Values of N, W, and Fhave been calculated and are included in Table 2, which lists values for a number of elements. The values of W and Vare reasonable but that of N is surprisingly low [9]. It may be related to the fact that anions are the mobile species in silica and the number of entry sites is limited. 

Values of N, W, and V Obtained from Kinetic Data by Fitting the Cabrera-Mott Expression "... 

Copper is not expected to follow Cabrera-Mott inverse logaridimic kinetics since its oxide is a modifier according to Table 1. In fact, copper follows direct logarithmic kinetics. This was emphasized by results (Table 2) from die analysis of experimental data [5e,9] including the results shown in Figure 2. No attempt is made here to apply the Fehlner-Mott direct logarithmic expression, Eq. (5) above. This is because the evidenee for oxide recrystallization with time is very complex. Onay [39] reported on the formation of multiphase, multilayer scales on copper at 300°C. He foimd that they result from the dissociation of compact cuprous oxide scale that has lost contact with the copper substrate. 

Equation 1.4 directly implies the time behavior (rate) of oxide growth. An inverse logarithmic growth law according to the following expression can be derived to a good approximation (Cabrera and Mott [55]) ... 

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