Buried waveguide layers

35 pm due to compaction of the first 5 pm of the surface as a result of densifi-cation. Good agreement between theoretical calculation of the energy loss using the TRIM program and the actual depth of the waveguide layer can be seen. 

Comparison of the intensity distributions between a surface waveguide and a buried waveguide shows that the intensity distribution in the y-direction (normal to the surface) is symmetric only in the case of a buried waveguide [159] and shows a slight asymmetric shape for a surface waveguide. 

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Fig. 7 presents another example of a very high-contrast waveguide - a rectangular buried waveguide covered by a gold layer. Strong hybridization of the waveguide mode with the antisymmetric surface plasmon is clearly manifested. 

Figure 7. Left cross-section of a buried waveguide covered by a gold layer. Right Field distribution of a quasi-TM-polarized mode. (Courtesy of J. Petracek, TU Bmo.)...

Fig. 1 Low-to ultrahigh porosity silicon structures (a) <5 % macroporous wafer (b) buried porosity for layer transfer (Terheiden et al. 2011) (c) 35 % porosity membrane for thermoelectrics (Tang et al. 2010) (d) a 40 % macroporous photonic crystal waveguide (Muller et al. 2000) (e) microfabricated 60 % mesoporous microparticles for drag delivery (Chiappini etal. 2010) (f) a 70 % mesoporous nanowire for photocatalysis (Quet al. 2010) (g) double-walled silicon nanotubes ( 80 % porosity) for battery anodes (Wu et al. 2012) (h) photoluminescent 95 % mesoporous aerocrystal (Canham et al. 1994)...

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