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Boron nitride trichloroborazine

Amorphous boron nitride (a-BN) can be synthesized by decomposition of B-trichloroborazine and cesium [23]. Such layers are applied during production of semiconductor devices [24]. [Pg.8]

Highly crystalline hexagonal boron nitride layers can be formed on graphite layers which have been obtained from the CVD of benzene [128]. Low-pressure CVD originating from 2,4,6-trichloroborazine on graphite, metallic, and oxide ceramic substrates at 1050°C leads to dense, amorphous boron nitride deposits [129] see also [130]. Ceramics are frequently coated or infiltrated with a-BN by the different chemical vapor deposition (CVD) methods already... [Pg.64]

Auwarter, W., Suter, H.U., Sachdev, H., and Greber, T. (2004) Synthesis of one monolayer of hexagonal boron nitride on Ni(lll) from B-trichloroborazine (C1BNH)3. Chem. Mater., 16, 343-345. [Pg.474]

Stolle, R. and Wahl, G. (1995) Deposition of boron nitride films from BB B"-trichloroborazine. European Conference on CVD, 10, Venice, Italy. J. Phys. IV, 5 (2), C5.761-C5.768. [Pg.478]

The use of reductive (Wurtz) coupling of borazine rings by combination of B-haloborazines with Group 1 metals has also been explored. This approach has recently been reexamined by Shore who reported tiiat trichloroborazine and Cs metal react explosively at 125°C with formation of a insoluble, perhaps polymeric, solid some of which has a tubular morphology. Most significantly, the tubular structure is retained in the final boron nitride pyrolysis product... [Pg.361]


See other pages where Boron nitride trichloroborazine is mentioned: [Pg.179]    [Pg.227]    [Pg.229]    [Pg.163]    [Pg.357]    [Pg.186]    [Pg.186]    [Pg.357]   
See also in sourсe #XX -- [ Pg.363 ]




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