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Bonding of gases to cold surfaces

A difference is made between the different bonding mechanisms as follows  [Pg.57]

Three differing capacities of a pump for the gases which can be pumped result from the size of the three surfaces (baffle, condensation surface at the outside of the second stage and sorption surface at the inside of the second stage). In the design of a cryopump, a mean gas composition (air) is assumed which naturally does not apply to all vacuum processes (sputtering processes, for example. See 2.1.9.6 Partial Regeneration ). [Pg.57]


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