Bombardment-induced pattern transfer

Role of Bombardment in Pattern Transfer Regime. Gokan et al. [18] measured the relative 02 RIE rates of a series of polymers and found that the RIE rates scaled inversely with the mass density of carbon as in their IBE study (several materials deviated from the correlation). The relative RIE rates [18] varied by a factor of 3 and do not show the large variations characteristic of the radical-induced mechanism [10]. These results strongly suggest a bombardment-induced mechanism, but one can not directly apply the IBE results to RIE conditions because IBE neutral-to-ion flux ratios are orders of magnitude lower than under RIE conditions. 

Bombardment-induced Yields in Pattern Transfer Regime. Visser and de Vries [29] estimated the sheath acceleration voltages in their system, and... 

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