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BLANKET VERSUS SELECTIVE TUNGSTEN

The main application of CVD-W in the immediate future is contact or via fill. We have seen that both selective and blanket tungsten can give plugged contacts and vias. Therefore, we need to investigate what process will be the first choice for a given situation. Two aspects are important the feasibility and the costs of the contact/via fill process. In addition, a very important criteria will be at what time will the fill process be needed in production. Let us first focus on the feasibility and process requirement aspects. [Pg.87]

See other pages where BLANKET VERSUS SELECTIVE TUNGSTEN is mentioned: [Pg.87]    [Pg.88]    [Pg.89]    [Pg.90]    [Pg.91]    [Pg.92]    [Pg.93]    [Pg.94]    [Pg.87]    [Pg.88]    [Pg.89]    [Pg.90]    [Pg.91]    [Pg.92]    [Pg.93]    [Pg.94]    [Pg.115]   


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Blanket tungsten

Blanketing

Selective Tungsten

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