Bell Jar Reactor, Barrel Susceptor

With this reactor design, the susceptor can be heated inductively by wrapping a coil around the bell jar, or radiantly from outside the bell jar. 

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Bell Jar Reactor, Barrel Susceptor If we wanted to place even more wafers in a reactor, one can go to a bell jar configuration and extend the tilted susceptor tube concept just described. Consider a reactor within a bell jar arranged as shown in Figure 21. 

Figure 21 Bell jar reactor, barrel susceptor, axial flow.

Bell Jar Reactor, Barrel Susceptor, Radial Flow In much the same way that we extended the tube reactor with parallel flow to a bell jar geometry, we can do the same with the tube reactor with normal flow. Consider Figure 22. Since the flow is entering radially from the outside, one way to heat the susceptor is with high powered lamps within the central cavity. Again, the susceptor could be rotated to improve uniformity. 

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