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Anodic tantala films

In this example (Rgure 41.10), multilayered thin anodic tantala films, comprising 0-rich layers of controlled thicknesses and locations, have been characterized by RF GD-TOFMS [24],... [Pg.954]

FIGURE 41.10 Multilayered anodic tantala films with O isotopes as tracers. Reproduced from Reference [24],... [Pg.955]

Molchan, I.S., Thompson, G.E., Skeldon, R, Trigoulet, N., Tempez, A., Chapon, P. (2010) Analysis of thin impurity-doped layers in anodic alumina and anodic tantala films by glow discharge time-of-flight mass spectrometry. Trans. Inst. Met. Finish, 88(3). [Pg.959]


See other pages where Anodic tantala films is mentioned: [Pg.957]    [Pg.957]    [Pg.953]   
See also in sourсe #XX -- [ Pg.954 , Pg.955 ]




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