Advantages and Disadvantages of CMP

A list of advantages and disadvantages of CMP are shown in Tables 1.1 and 1.2, respectively [15]. By no means are the lists complete, but they offer some useful comparisons with other associated or competing technologies. 

There is relatively poor control over process variables with narrow process latitude New types of defects from CMP can affect die yield. These defects become more critical for sub-0.25 pm feature sizes 

CMP requires additional process development for process control and metrology. An example is the endpoint of CMP is difficult to control for desired 

CMP processes materials require high maintenance and frequent replacements of chemicals and parts 

Fundamentally, other than the three major types of applications of CMP described in this chapter, what other types of application also exist or can be developed  

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