Adhesion Force of Silica and Alumina on Cu

The adhesion forces of silica and alumina particles in the DI water and slurry solution were measured by AFM and are shown in Fig. 16.27 [66]. The smallest adhesion force, 0.38 nN, was observed between the copper surface and alumina particles in a citric acid solution at pH 6. The largest adhesion force of alumina particles, 5.83 nN, was measured in DI water. 

The largest adhesion force of alumina particles in DI water was attributed to a stronger electrostatic attraction between alumina particles and copper surface in DI water owing to their opposite signs of zeta potentials. The smallest adhesion force of alumina particles in the citric acid slurry was attributed to the 

FIGURE 16.26 The change in cantilever shape as a function of applied force on a cantilever. 

FIGURE 16.27 The adhesion forces of the particles on copper in DI water and citric 

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