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Glow discharge abnormal

Greenberg, K.E., Abnormal-Glow-Discharge Deposition offung-sten, M/ / . Phys. Lett, 50(16) 1050-1052 (April 20,1987)... [Pg.183]

A/cm results in a transition of the abnormal glow discharge into an arc discharge. [Pg.181]

Abnormal glow discharge (plasma) The dc glow discharge where the cathode spot covers the whole cathode and an increase in the voltage increases the cathode current density. [Pg.553]

Cathode spot (plasma technology) The area on the cathode, under normal glow discharge conditions, in which the current is concentrated. As the current increases, the spot becomes bigger in order to maintain a constant current density in the cathode spot. In an Abnormal glow discharge, the cathode spot covers the whole cathode area. [Pg.576]

Glow Discharge Lamp A low-pressure discharge in an inert gas, characterized by abnormal glow and sputtering of solid sample cathodes. solids, residues 10,000... [Pg.303]

Abnormal, Subnormal, and Obstructed Regimes of Glow Discharges... [Pg.181]

Both, high frequency (HF) [63,64,66,67,100 and direct current (d.c.) [65,1101,102] glow discharge were used for the deposition. The apparatus used for the deposition in an HF discharge has been described [63]. Here we shall briefly describe the plasma CVD apparatus which operates under conditions of an abnormal d.c. glow discharge. [Pg.119]

Figure 5. Schematics of the apparatus for the deposition of ncTiN/aSi3N4 coatings in an abnormal direct current glow discharge (see text). Figure 5. Schematics of the apparatus for the deposition of ncTiN/aSi3N4 coatings in an abnormal direct current glow discharge (see text).
See other pages where Glow discharge abnormal is mentioned: [Pg.329]    [Pg.42]    [Pg.138]    [Pg.178]    [Pg.181]    [Pg.540]    [Pg.61]    [Pg.138]    [Pg.150]    [Pg.158]    [Pg.171]    [Pg.662]    [Pg.545]    [Pg.329]    [Pg.42]    [Pg.138]    [Pg.178]    [Pg.181]    [Pg.540]    [Pg.61]    [Pg.138]    [Pg.150]    [Pg.158]    [Pg.171]    [Pg.662]    [Pg.545]    [Pg.42]    [Pg.222]    [Pg.71]    [Pg.6]    [Pg.23]    [Pg.35]    [Pg.120]    [Pg.403]    [Pg.588]    [Pg.45]    [Pg.137]    [Pg.144]    [Pg.23]    [Pg.189]    [Pg.249]    [Pg.251]    [Pg.119]    [Pg.122]    [Pg.137]    [Pg.144]    [Pg.671]    [Pg.673]    [Pg.702]   
See also in sourсe #XX -- [ Pg.138 ]

See also in sourсe #XX -- [ Pg.138 ]

See also in sourсe #XX -- [ Pg.150 ]

See also in sourсe #XX -- [ Pg.158 , Pg.171 ]

See also in sourсe #XX -- [ Pg.545 ]



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